HQ-Dielectrics® is an independent German company with unique expertise in equipment engineering, manufacturing and technology development for the semiconductor production value chain. We supply solutions for front-end of line (FEoL) processing in thin film technologies and innovative process engineering.
HQ-Dielectrics® supports new and existing projects with its technology know-how and develops new manufacturing tools or parts for mass production and refurbishes or adapts automation solutions for existing production lines (150 mm and smaller, up to 300 mm and also 450 mm). This includes fab automation based on SEMI standards. HQ-D® is also partner in various EU funded projects for leading edge technology and semiconductor equipment assessment.
HQ-D® develops process technology to constantly improve the oxide reliability on Si and SiC substrates for high performance chips in the manufacturing production sequences. Basis for that is our industrial experience in semiconductor manufacturing value chain.
Featuring Rapid Thermal Processing
The Hemera rapid thermal processing equipment (RTP) is based on the same chamber concept and is currently available for wafer sizes up to 200mm with manual and automated wafer loading. We also developed related automatic handling systems (equipment front end module, EFEM) including fab automation for up to 300mm wafer size. In case of small wafer sizes (50-100mm) also multi wafer processing is possible. Automatic or manual loading systems to upgrade processing tools are available too.
Featuring Plasma Processing
HQ-Dielectrics Hyperion systems are low-temperature microwave plasma oxidation and nitridation equipment, with an optional lower tungsten halogen lamp field for additional and separate rapid thermal heating. They are available for wafer sizes ranging from 50mm to 300mm.
For more information on HQ-Dielectrics,
visit their website at http://www.hq-dielectrics.eu/